We theoretically investigate thermal conductivity in silicon nanomeshes usingMonte Carlo simulations of phonon transport. Silicon membranes of 100nmthickness with randomly located pores of 50nm diameter are considered. Theeffects of material porosity and pore surface roughness are examined. Nanomeshporosity is found to have a strong detrimental effect on thermal conductivity.At room temperature, a porosity of 50% results in ~80% reduction in thermalconductivity. Boundary roughness scattering further degrades thermalconductivity, but its effect is weaker. Thermal transport can additionally beaffected by the specific arrangement of the pores along the transportdirection.
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